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部分半導體二手設備清單：
◈ Semiconductor Used Tool List_Solution Technology_Rev02_201302
Wafer Size Classification Tool Information
Maker Model
12¨ CMP CMP AMAT Reflexion
12¨ CMP CMP AMAT Reflexion LK CMP
8¨ CMP CMP AMAT Mirra CMP
8¨ CMP CMP System Polisher NOVELLUS 676
12¨ DIFF EPI AMAT Centura Epi
8¨ DIFF EPI AMAT Centura Epi
12¨ DIFF RTP AMAT Vantage Radiance/Centura RTP
8¨ DIFF RTP AMAT Centura RTP
12¨ DIFF SiNgen AMAT Centura SiNgen
8¨ DIFF SiNgen AMAT Centura SiNgen
8¨ DIFF Ion Implanter(high current) AMAT PI-9500
8¨ DIFF Furnace KE DJ-853V-8DL
6¨/8¨ DIFF Furnace KE VERTRON Ⅲ
